The Cross-beam system makes use of a SEM for imaging and Focussed Ion Beam (FIB) for milling or as a cutting tool. Consecutive face-block imaging and milling results in 3D image data sets. Because the milling with the FIB can be tuned very precisely, both XY- and Z-resolution are in the nanometer range. This allows very detailed 3D segmentation and volume rendering of imaged objects within a sample.